JPH065627Y2 - アルミニウム材中のガス分析装置 - Google Patents
アルミニウム材中のガス分析装置Info
- Publication number
- JPH065627Y2 JPH065627Y2 JP1985174397U JP17439785U JPH065627Y2 JP H065627 Y2 JPH065627 Y2 JP H065627Y2 JP 1985174397 U JP1985174397 U JP 1985174397U JP 17439785 U JP17439785 U JP 17439785U JP H065627 Y2 JPH065627 Y2 JP H065627Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- discharge cleaning
- chamber
- sample
- cleaning chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052782 aluminium Inorganic materials 0.000 title claims description 28
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims description 27
- 239000000463 material Substances 0.000 title claims description 24
- 238000004140 cleaning Methods 0.000 claims description 59
- 238000004868 gas analysis Methods 0.000 claims description 37
- 239000007789 gas Substances 0.000 description 77
- 239000001307 helium Substances 0.000 description 13
- 229910052734 helium Inorganic materials 0.000 description 13
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 13
- 238000000034 method Methods 0.000 description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 238000000605 extraction Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000011002 quantification Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002414 normal-phase solid-phase extraction Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000001304 sample melting Methods 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
- 238000010407 vacuum cleaning Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating And Analyzing Materials By Characteristic Methods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985174397U JPH065627Y2 (ja) | 1985-11-12 | 1985-11-12 | アルミニウム材中のガス分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985174397U JPH065627Y2 (ja) | 1985-11-12 | 1985-11-12 | アルミニウム材中のガス分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6283953U JPS6283953U (en]) | 1987-05-28 |
| JPH065627Y2 true JPH065627Y2 (ja) | 1994-02-09 |
Family
ID=31112740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985174397U Expired - Lifetime JPH065627Y2 (ja) | 1985-11-12 | 1985-11-12 | アルミニウム材中のガス分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH065627Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010210266A (ja) * | 2009-03-06 | 2010-09-24 | Toyota Motor Corp | ガス分析装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0620126Y2 (ja) * | 1988-10-17 | 1994-05-25 | 株式会社堀場製作所 | 元素分析装置用脱ガス装置 |
| EP1279958A4 (en) * | 2000-10-12 | 2005-02-23 | Jfe Steel Corp | METHOD FOR TREATING A METALLANALYSIS SAMPLE AND ESTABLISHMENT THEREFOR |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5853480A (ja) * | 1981-09-28 | 1983-03-30 | Showa Highpolymer Co Ltd | 素材或は成形品に模様を付する方法 |
| JPS59157566A (ja) * | 1983-02-28 | 1984-09-06 | Nippon Steel Corp | 金属中の窒素分析方法ならびに分析装置 |
| JPS60174863A (ja) * | 1984-02-15 | 1985-09-09 | Showa Alum Corp | 薄膜形成用アルミニウム基材の表面処理方法 |
-
1985
- 1985-11-12 JP JP1985174397U patent/JPH065627Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010210266A (ja) * | 2009-03-06 | 2010-09-24 | Toyota Motor Corp | ガス分析装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6283953U (en]) | 1987-05-28 |
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